ME 645: MEMS – Design, fabrication and characterization

Description:

This course gives an introduction to Micro Electro-Mechanical Systems (MEMS) which have varied applications ranging from sensors and accelerometers to inkjet printer cartridges. It will mostly involve techniques and processes to design and create miniature systems.

Course Content:

This course will be handled in three parts:

  • Fabrication
    • Conventional (VLSI) processes: lithography, etching etc.
    • Nonconventional processes: microstereolithography, laser micromachining etc.
  • Design and analysis
    • Basic concepts of design
    • Design for fabrication, other design considerations
    • MEM systems theoretic analysis
    • Considerations and use of FEM for MEMS analysis, Modeling and simulation techniques
  • Characterization
    • Scanning probe microscopy
    • Scanning electron microscopy
    • Laser Doppler vibrometer
    • Interference based techniques

There will be some visits to the MEMS lab along with some demonstrations and a course project involving design and/or fabrication of a MEMS device.

Resources:

The lecture slides supplied by the professor along with your class notes should be enough for this course. Make it a point to make notes, as the slides aren’t always very detailed.

Other than that, there is an MIT ocw course on Design and Fabrication of Microelectromechanical Devices:

http://ocw.mit.edu/courses/electrical-engineering-and-computer-science/6-777j-design-and-fabrication-of-microelectromechanical-devices-spring-2007/

NPTEL course on MEMS and Microsystems:

http://nptel.ac.in/courses/117105082/

However note that both the above online courses are taken from an electronics point of view and therefore are of limited use.

Videos:

A good introductory video:

History of MEMS:

An interesting application of MEMS technology:

A chemically powered microgripper:

 

(Written by Pushkar Pandit; Course taken by Prof. P.S. Gandhi in spring 14)

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